Silane Compressor
Silane Compressor
- Gas Type: Silane (SiH₄)
- Flow Rate: 5 – 300 Nm³/h
- Suction Pressure: 0.1 – 30 bar (g)
- Discharge Pressure: Up to 200 bar (g)
- Compression Stages: 1 – 3 stages
- Diaphragm Material: Stainless Steel / Hastelloy / Inconel
- Cooling System: Water-cooled or air-cooled
- Motor Power: 5 – 90 kW
- Drive Type: Electric motor (explosion-proof optional)
- Skid Integration: Optional full skid with piping & automation
- Certifications: CE / ATEX / ISO9001
Overview
The silane diaphragm compressor is a highly specialized gas compression solution designed for handling silane (SiH₄) — a colorless, pyrophoric, and highly reactive gas commonly used in semiconductor manufacturing, photovoltaic panel production, and specialty chemical industries. Due to the extreme sensitivity of silane to oxygen, moisture, and hydrocarbons, traditional lubricated compressors are unsuitable.
Instead, the diaphragm compressor uses a metal membrane compression mechanism, ensuring oil-free, leak-proof, and contaminant-free gas compression, making it the safest and most effective choice for silane gas systems.
Why Silane Requires a Diaphragm Compressor
Silane is not only highly flammable but also spontaneously combustible in air, even at low concentrations. Compressing such a hazardous gas requires:
- Zero contact with lubricants
- No mechanical contamination
- Tight gas isolation from the environment
- Explosion-proof and leak-proof construction
The diaphragm compressor achieves this with its non-lubricated compression chamber and multi-layer metal diaphragm system, preventing any chance of ignition, contamination, or leakage.
Key Features of the Silane Diaphragm Compressor
·Oil-Free and Clean Compression
All gas-wetted parts are completely isolated from the drive mechanism using high-grade metal diaphragms, ensuring that silane gas remains 100% uncontaminated.
·Multi-Layer Diaphragm Structure
Typically includes a three-layer stainless steel or Hastelloy membrane, offering mechanical strength, chemical resistance, and leak containment — even in the case of primary membrane rupture.
·Explosion-Proof Design
Compressor systems are housed in ATEX/IECEx certified enclosures with explosion-proof motors, flameproof panels, and gas-tight construction.
·Corrosion-Resistant Materials
All contact surfaces are made of SS316L, Hastelloy, Inconel, or other corrosion- and flame-resistant alloys to prevent gas degradation and equipment failure.
·Integrated Purging and Inerting System
Equipped with nitrogen purge ports, pre- and post-purge sequences, and inert gas blanketing to ensure safe startup, operation, and shutdown.
·Precision Control System
Advanced PLC-based control with HMI touchscreen, enabling real-time monitoring of gas flow, diaphragm integrity, system pressure, and fault detection.
·Compact Modular Skid Design
Fully integrated units with valves, piping, safety instruments, silencers, and cooling system — delivered as turnkey solutions for quick installation and commissioning.
Safety Features and Compliance
Silane is categorized as a Class 1 pyrophoric gas, and any compressor used for it must comply with the highest international safety standards. The silane diaphragm compressor is engineered with:
- Triple diaphragm safety protection
- Pressure relief valves & rupture discs
- Gas leak detection and interlock shutdown
- Emergency stop system (ESD)
- Flameproof control boxes & enclosures
- Anti-static and ground protection
- Remote monitoring & control capability
Application Areas
- Semiconductor Fabrication
For silane delivery in CVD (Chemical Vapor Deposition) and etching processes.
- Photovoltaic Cell Production
Used in thin-film silicon layer deposition during solar panel manufacturing.
- Specialty Gas Distribution
For ultra-high purity (UHP) gas filling and pipeline transfer systems.
- R&D Labs and Pilot Plants
Where high-purity and reactive gases are tested in controlled environments.
