SiH₄ Diaphragm Compressor

Overview

A SiH₄ compressor, also known as a silane diaphragm compressor, is a precision-engineered gas compression solution specifically designed for handling silane (SiH₄) — a highly reactive, flammable, and pyrophoric gas widely used in the semiconductor, photovoltaic, and specialty chemical industries. This compressor adopts a metal diaphragm compression structure to ensure gas purity, leak-free performance, and absolute operational safety.

Why Use a Diaphragm Compressor for SiH₄?

Silane is extremely sensitive to air, moisture, and heat. Its spontaneous combustibility demands 100% oil-free, hermetically sealed, and non-contaminating compression environments. A diaphragm compressor is the ideal technology because it:

• Eliminates direct contact between the gas and lubricating oil or piston parts
• Uses a multi-layer metal diaphragm for physical gas containment
• Provides non-leak, high-purity compressionideal for ultra-high-purity gas applications
• Ensures operator safety and system integrity in hazardous environments

Core Features of SiH₄ Diaphragm Compressors

·100% Oil-Free Design

Utilizes metal diaphragms to completely isolate silane gas from the drive components, ensuring ultra-clean gas delivery without contamination.

·Leak-Free Compression Chambers

The triple-layer diaphragm system prevents any gas leakage, making the compressor ideal for toxic, flammable, and high-purity gas operations.

·Explosion-Proof Configuration

Available with ATEX-certified explosion-proof motors, gas-tight sealing elements, flame arrestors, and nitrogen-purged housings for maximum safety. 

·Low Gas Residue and Dead Space

Optimized internal geometry minimizes gas hold-up, reducing contamination risk and gas loss during startup/shutdown. 

·Automated PLC Control System

Equipped with intelligent PLC-based controls for monitoring diaphragm condition, pressure, temperature, and emergency shutdown features.

·Corrosion-Resistant Materials

All wetted parts are made from corrosion-resistant stainless steel, Hastelloy, or nickel alloys depending on gas purity and reactivity requirements.

Applications of SiH₄Compressors

• Semiconductor Manufacturing– Used to compress and transport ultra-pure silane for thin-film deposition (CVD, PECVD).
• Solar Panel Production– Enables high-purity silane delivery for photovoltaic silicon wafer fabrication.
• Specialty Chemicals– Compresses silane gas for chemical synthesis in controlled industrial processes.
• Gas Distribution Systems– Used in silane gas trailer filling, bottling, or onsite process delivery systems.

Safety & Compliance

Silane gas poses unique explosion and toxicity risks. Therefore, SiH₄ diaphragm compressors are designed in compliance with:

• ATEX / IECEx / CE Safety Certifications
• API 618 (relevant for diaphragm compressors)
• ISO 8573 Class 0 for oil-free compression
• Emergency shutdown (ESD) systems
• Inert gas purging systems for startup and shutdown safety
• Real-time leak detection with auto cut-off

Advantages of Our SiH₄Diaphragm Compressor Solutions

• Ultra-Pure Compression– Ideal for UHP (ultra-high purity) and semiconductor-grade gas handling
• Unmatched Safety– Fully sealed, non-leak design minimizes operational hazards
• Energy Efficient– Optimized diaphragm movement and intelligent control systems lower energy use
• Custom Configurable– Available in vertical/horizontal designs, integrated skids, or cabinet-mounted systems
• Long Service Life– Durable diaphragms and minimal wear components reduce maintenance frequency

Integrated Skid-Mounted System Options

We offer complete SiH₄ diaphragm compressor packages that include:

• Inlet gas purification filter
• Cooling system (air or water-based)
• PLC control cabinet
• Emergency stop & alarm modules
• Gas recovery or purge systems
• Stainless steel interconnecting pipelines